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- Title:
Characterisation of the Intrinsic Stress in Micromachined Parylene Membranes
- Document type:
- Konferenzbeitrag
- Author(s):
- Zöpfl, Teresa; Klare, Stefan; Wachutka, Gerhard; Schrag, Gabriele
- Book / Congress title:
- Proceedings of SPIE: Smart Sensors, Actuators, and MEMS IV
- Volume:
- 7362
- Year:
- 2009
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