Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers

Title:: Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers
Document type:: Zeitschriftenaufsatz
Author(s):: Dogan, Gül; Demir, Sinan O.; Gutzler, Rico; Gruhn, Herbert; Dayan, Cem B.; Sanli, Umut T.; Silber, Christian; Culha, Utku; Sitti, Metin; Schütz, Gisela; Grévent, Corinne; Keskinbora, Kahraman
Journal title:: ACS Applied Materials & Interfaces
Year:: 2021
Journal volume:: 13
Journal issue:: 45
Pages contribution:: 54503-54515
Fulltext / DOI:: doi:10.1021/acsami.1c14586
WWW:: https://doi.org/10.1021/acsami.1c14586
Notes:: PMID: 34735111
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