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- Document type:
- Konferenzbeitrag
- Author(s):
- Herrmann, Andreas; Hielscher, Christof; Mueller, Alexander; Hoelzer, Gisbert; Graeb, Helmut
- Title:
- Realistic Worst-Case Parameter Sets for MEMS Technologies
- Book / Congress title:
- International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)
- Year:
- 2017
- Month:
- jun
- CC license:
- by, http://creativecommons.org/licenses/by/4.0
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