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- Document type:
- Konferenzbeitrag
- Author(s):
- Voss, Andrej; Seyfert, Lars; Schwesinger, Norbert; Hemmert, Werner
- Title:
- Stroboscopic video microscopy with sub-nanometer accuracy for characterizing and monitoring MEMS
- Editor:
- Shull, Peter J.; Yu, Tzuyang; Gyekenyesi, Andrew L.; Wu, H. Felix
- Book / Congress title:
- Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XVI
- Publisher:
- SPIE
- Date of publication:
- 18.04.2022
- Year:
- 2022
- Fulltext / DOI:
- doi:10.1117/12.2612552
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