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- Document type:
- Konferenzbeitrag
- Author(s):
- Burcea, Florin; Herrmann, Andreas; Li, Bing; Graeb, Helmut
- Title:
- MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side
- Book / Congress title:
- IEEE International Conference on Electronics, Circuits, and Systems (ICECS)
- Year:
- 2018
- Month:
- dec
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