Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

Title:: Automated, deep reactive ion etching free fiber coupling to nanophotonic devices
Document type:: Konferenzbeitrag
Author(s):: Flassig, Fabian; Flaschmann, Rasmus; Kainz, Thomas; Ernst, Sven; Strohauer, Stefan; Schmid, Christian; Zugliani, Lucio; Müller, Kai; Finley, Jonathan J.
Editor:: Razeghi, Manijeh; Khodaparast, Giti A.; Vitiello, Miriam S.
Book / Congress title:: Quantum Sensing and Nano Electronics and Photonics XVIII
Publisher:: SPIE
Date of publication:: 05.03.2022
Year:: 2022
Fulltext / DOI:: doi:10.1117/12.2611160
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