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- Document type:
- Konferenzbeitrag
- Author(s):
- Voss A., Seyfert L., Hemmert W.
- Title:
- Stroboscopic Video Microscopy for In-Plane Motion Measurements Up to 2 MHz with Picometer Resolution
- Book / Congress title:
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publisher:
- IEEE
- Date of publication:
- 25.01.2021
- Year:
- 2021
- Fulltext / DOI:
- doi:10.1109/mems51782.2021.9375327
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