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Title:

Stroboscopic video microscopy with sub-nanometer accuracy for characterizing and monitoring MEMS

Document type:
Konferenzbeitrag
Author(s):
Voss, Andrej; Seyfert, Lars; Schwesinger, Norbert; Hemmert, Werner
Editor:
Shull, Peter J.; Yu, Tzuyang; Gyekenyesi, Andrew L.; Wu, H. Felix
Book / Congress title:
Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XVI
Publisher:
SPIE
Date of publication:
18.04.2022
Year:
2022
Fulltext / DOI:
doi:10.1117/12.2612552
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