Stroboscopic video microscopy with sub-nanometer accuracy for characterizing and monitoring MEMS

Titel:: Stroboscopic video microscopy with sub-nanometer accuracy for characterizing and monitoring MEMS
Dokumenttyp:: Konferenzbeitrag
Autor(en):: Voss, Andrej; Seyfert, Lars; Schwesinger, Norbert; Hemmert, Werner
Herausgeber:: Shull, Peter J.; Yu, Tzuyang; Gyekenyesi, Andrew L.; Wu, H. Felix
Kongress- / Buchtitel:: Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XVI
Verlag / Institution:: SPIE
Publikationsdatum:: 18.04.2022
Jahr:: 2022
Volltext / DOI:: doi:10.1117/12.2612552
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