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Title:

Physics-Based System-level Modeling of Acoustic MEMS Transducers by Generalized Kirchhoffian Networks: a Perspective View

Document type:
Konferenzbeitrag
Author(s):
Schrag, G.; Bosetti, G.
Pages contribution:
1-5
Abstract:
Two exemplary applications from the field of acoustic and ultrasonic transducers are used to demonstrate how system models can be derived using a generic thermodynamic framework in a way that they are optimally adapted to the problem in terms of their level of abstraction. The models are formulated as generalized Kirchhoff networks and are physics-based, so that relevant design parameters are accessible at system level. First, the flexibility of the method w.r.t. true to detail modeling is shown...     »
Keywords:
system-level modeling; multi-physics modeling; acoustic transducers; airborne ultrasound transducers; automatic optimization; Visual Perspective; Physics-based Models; Acoustic Transducer; System-level Model; Design Parameters; Level Of Abstraction; Examples Of Systems; Flexible Method; Exemplary Application; Actuator; Damping; Frequency Response; Counter Electrode; Numerical Algorithm; Higher Level of Abstraction; Modeling Platform; Lumped Elements; Compact Model; Diff...     »
Dewey Decimal Classification:
620 Ingenieurwissenschaften
Book / Congress title:
2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
Date of congress:
02-05.06.2024
Publisher:
IEEE
Date of publication:
02.06.2024
Year:
2024
Quarter:
2. Quartal
E-ISBN:
979-8-3503-7826-9
Bookseries ISSN:
2768-1874
Language:
en
Fulltext / DOI:
doi:10.1109/dtip62575.2024.10613058
WWW:
https://ieeexplore.ieee.org/document/10613058/metrics#metrics
TUM Institution:
CIT EE Professur für Mikrosensorik und -aktorik (Prof. Schrag)
Copyright statement:
© Copyright 2025 IEEE - All rights reserved, including rights for text and data mining and training of artificial intelligence and similar technologies. Copyright © 2024, IEEE
Ingested:
20.01.2025
Last change:
20.01.2025
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