OT1.173 - High-Fidelity Modeling of Harmonic Distortions in Piezoelectric MEMS Microphones with a Corrugated Membrane

We present a high-fidelity, computationally efficient approach for modeling harmonic distortions in piezoelectric MEMS microphones featuring a fully-clamped corrugated membrane design. The described method correctly predicts the total harmonic distortion (THD) of two manufactured design variants, thereby paving the way for THD optimization throughout the design process. Remarkably, one of the design variants shows a THD of 1% at a very high sound pressure level (SPL) of 130 dBSPL, thus out-performing commercially available piezoelectric and capacitive single-backplate (SBP) microphones.     «

We present a high-fidelity, computationally efficient approach for modeling harmonic distortions in piezoelectric MEMS microphones featuring a fully-clamped corrugated membrane design. The described method correctly predicts the total harmonic distortion (THD) of two manufactured design variants, thereby paving the way for THD optimization throughout the design process. Remarkably, one of the design variants shows a THD of 1% at a very high sound pressure level (SPL) of 130 dBSPL, thus out-perfo...     »