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Title:

Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms

Document type:
Konferenzbeitrag
Author(s):
Bosetti, G.; Bretthauer, C.; Bogner, A.; Krenzer, M.; Gierl, K.; Heiss, H.; Schrag, G.
Book / Congress title:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Publisher:
IEEE
Date of publication:
07.04.2024
Year:
2024
Fulltext / DOI:
doi:10.1109/eurosime60745.2024.10491462
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