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- Titel:
Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation
- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Bosetti, G.; Bretthauer, C.; Steinberger, M.; Gierl, K.; Krenzer, M.; Schrag, G.
- Stichworte:
- Bosetti; Schrag; Bretthauer; Steinberger; Gierl; Krenzer; Aluminium; Nitride; Membranes; MEMS; piezoelectric; Transducers; Differential; Readout
- Kongress- / Buchtitel:
- 2023 IEEE International Ultrasonics Symposium (IUS)
- Verlag / Institution:
- IEEE
- Publikationsdatum:
- 03.09.2023
- Jahr:
- 2023
- Volltext / DOI:
- doi:10.1109/ius51837.2023.10307891
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