A Novel High-SNR Full Bandwidth Piezoelectric MEMS Microphone Based on a Fully Clamped Aluminum Nitride Corrugated Membrane
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
IEEE Xplore
2023
ON THE USE OF 3D-PRINTED ULTRASONIC HORNS TO TUNE THE FREQUENCY RESPONSE OF AIRBORNE MEMS TRANSDUCERS
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
IEEE
2023
Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation
2023 IEEE International Ultrasonics Symposium (IUS)
IEEE
2023
High-Throughput Apparatus for Semiconductor Device Characterization in a Magnetic Field at Extreme High Temperatures
IEEE Transactions on Instrumentation and Measurement
2023
72
1-8
Simulation von Dämpfungseffekten in unregelmäßig perforierten MEMS Bauteilen durch Kompaktmodelle
MikroSystemTechnik Kongress 2023
2023
Humidity Sensing for free—advanced thermoacoustic signal models in miniaturized photoacoustic gas sensors
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
IEEE
2023
Predictive Modelling of Emitter Systems in Photoacoustic Gas Sensing
2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
IEEE
2023
E7.1 - Miniaturized SMD-Reflow-Capable Photoacoustic CO2-Sensor Using a Dual-Chamber Approach
Lectures
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany
2023
C3.4 - Everything at once—Linearizing System Response and Enhancing Sensitivity in Photoacoustic Gas Sensors by Demodulation and Filter Tuning
Lectures
AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany
2023
Integrierte, siliziumbasierte, miniaturisierte Pumpen und Strömungssensoren für mobile mikrofluidische Systeme
2023
Dissertation
143 Seiten