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- Document type:
- Konferenzbeitrag
- Author(s):
- Bosetti, Gabriele; Bretthauer, Christian; Steinberger, Michael; Gierl, Karolina; Krenzer, Michael; Schrag, Gabriele
- Title:
- Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation
- Book / Congress title:
- 2023 IEEE International Ultrasonics Symposium (IUS)
- Publisher:
- IEEE
- Date of publication:
- 03.09.2023
- Year:
- 2023
- Fulltext / DOI:
- doi:10.1109/ius51837.2023.10307891
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