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Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Gabriele Bosetti; Christian Bretthauer; Andreas Bogner; Michael Krenzer; Karolina Gierl; Hans-Joerg Timme; Heinrich Heiss; Gabriele Schrag
Title:
A Novel High-SNR Full Bandwidth Piezoelectric MEMS Microphone Based on a Fully Clamped Aluminum Nitride Corrugated Membrane
Abstract:
We present an innovative design and the related fabrication method for a high-SNR piezoelectric MEMS microphone based on fully clamped corrugated aluminum nitride (AlN) membrane. The corrugations allow for effective intrinsic stress relaxation and additionally enable differential signal generation by exploiting a pseudo-bimorph effect. Two distinct designs are compared against a state-of-the-art commercial cantilever-based piezoelectric MEMS microphone of same die and similar package size. We sh...     »
Keywords:
Bosetti; Schrag; Transducers; MEMS; Inginenieurwissenschaften; Naturwissenschaften; SNR; Aluminium; AIN; piezoelectric; microphone; LFRO;
Dewey Decimal Classification:
620 Ingenieurwissenschaften
Book / Congress title:
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Date of congress:
25-29 June 2023
Publisher:
IEEE Xplore
Date of publication:
07.05.2024
Year:
2023
Quarter:
2. Quartal
Year / month:
2023-05
Pages:
369
Print-ISBN:
979-8-3503-3302-2
E-ISBN:
978-4-88686-435-2
WWW:
https://ieeexplore.ieee.org/document/10516986
TUM Institution:
Lehrstuhl für Technische Elektrophysik (Prof. Dr. Schrag)
Copyright statement:
Authorized licensed use limited to: Technische Universitaet Muenchen. Downloaded on May 27,2024 at 11:15:45 UTC from IEEE Xplore. Restrictions apply. 978-4-88686-435-2 ©2023 IEEJ
Ingested:
27.05.2024
Last change:
27.05.2024
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