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Titel:

Determination of the local gold contact morphology on a photoative polymer film using nanobeam GISAXS

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Ruderer, M. A.; Körstgens, V.; Metwalli, E.; Al-Hussein, M.; Vainio, U.; Roth, S. V.; Döhrmann, R.; Gehrke, R.; Gebhardt, R.; Burghammer, M.; Müller-Buschbaum, P.
Abstract:
Grazing incidence small-angle X-ray scattering is performed with a nanometer sized X-ray beam (nGISAXS) to probe the local gold contact morphology on a photoactive polymer film. By evaporation a 50 nm thick gold contact is installed on a diblock copolymer film, which consists of a non-conducting poly(styrene) (PS) and a semi-conducting poly(paraphenylene) (PPP) block. The region around the edge of the gold contact of 200 \textgreekmm is probed with nGISAXS by scanning the sample position in step...     »
Stichworte:
Film structure; GISAXS; Phtoactive polymer; thin diblock copolymer film; Thin layers
Zeitschriftentitel:
Nuclear Instruments and Methods in Physics Research B
Jahr:
2010
Band / Volume:
268
Seitenangaben Beitrag:
403--410
Volltext / DOI:
doi:10.1016/j.nimb.2009.07.014
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