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- Document type:
- Konferenzbeitrag
- Author(s):
- Hölzl, Wolfgang; Seidl, Martin; Schrag, Gabriele
- Title:
- Fully-Coupled Transient Modeling of Highly Miniaturized Electrostatic Pull-In Driven Micropumps
- Book / Congress title:
- 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
- Year:
- 2023
- Pages:
- 1-11
- Fulltext / DOI:
- doi:10.1109/EuroSimE56861.2023.10100814
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