Meier, S.;Rinck, H.;Lange, B.;Muellner, E.;Brederlow, R.;Enzelberger-Heim, M.;Summerfelt, S.;Kreupl, F.;Wolf, B.
Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloy
2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
IEEE
2020