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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Niessner, M. ; Iannacci, J. ; Schrag, G. 
Title:
Mechanical Contact in System-level Models of Electrostatically Actuated RF-MEMS Switches: Experimental Analysis and Modeling 
Pages contribution:
80660Y-1-9 
Book / Congress title:
Proceedings of SPIE: Smart Sensors, Actuators and MEMS V 
Congress (additional information):
SPIE Microtechnologies 2011, April 18-20, Prague, Czech Republic 
Year:
2011 
Reviewed:
ja 
Language:
en 
Semester:
SS 02 
Format:
Text