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Title:

Dynamic implantation – an improved approach for a large area SIMS measurement

Document type:
Zeitschriftenaufsatz
Author(s):
Höschen, Carmen; Lugmeier, Johann
Journal title:
Journal of Analytical Atomic Spectrometry
Year:
2023
Journal volume:
38
Journal issue:
2
Pages contribution:
267-275
Fulltext / DOI:
doi:10.1039/d2ja00190j
Publisher:
Royal Society of Chemistry (RSC)
E-ISSN:
0267-94771364-5544
Date of publication:
01.01.2023
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