Fluidic Damping in Micro- and Nano-Scale Mechanical Resonators in the Molecular Flow Regime: A Momentum Transfer Based Analytical Approach

Manz, J.; Wachutka, G.; Schrag, G.

Title:: Fluidic Damping in Micro- and Nano-Scale Mechanical Resonators in the Molecular Flow Regime: A Momentum Transfer Based Analytical Approach
Document type:: Konferenzbeitrag
Author(s):: Manz, J.; Wachutka, G.; Schrag, G.
Book / Congress title:: Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
Date of congress:: June 21-25
Year:: 2015
Pages:: 2168-2171
BibTeX