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- Titel:
Fluidic Damping in Micro- and Nano-Scale Mechanical Resonators in the Molecular Flow Regime: A Momentum Transfer Based Analytical Approach
- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Manz, J.; Wachutka, G.; Schrag, G.
- Kongress- / Buchtitel:
- Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
- Datum der Konferenz:
- June 21-25
- Jahr:
- 2015
- Seiten:
- 2168-2171
BibTeX
Vorkommen:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)