Kaczer, B.; Larcher, L.; Vandelli, L.;.Reisinger, H.; Popovicia, M.; Climaa, S.; Jie, Z.; Swertsa, S.J.J.; Redolfia, A.; Afanas’ev, V.V.; Jurczaka, M.
SrTiOx for sub-20 nm DRAM technology nodes—Characterization and modeling
INFOS 2015 Microelectronic Engineering Volume 147 2015-11
2015
Nov
126-129