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- Title:
Mixed-Level Modeling of Squeeze Film Damping in MEMS: Simulation and Pressure-Dependent Experimental Validation
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Niessner, M. ; Schrag, G.; Iannacci, J. ; Wachutka, G.
- Pages contribution:
- 1693-1696
- Book / Congress title:
- Technical Digest of the 16th Int. Conference on Solid-State Sensors, Actuators and Microsystems -TRANSDUCERS` 2011
- Congress (additional information):
- June 5-9, Beijing, China
- Year:
- 2011
- Reviewed:
- ja
- Language:
- en
- Publication format:
- CD-ROM / DVD
- Semester:
- SS 02
- Format:
- Text
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