Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation

Title:: Single-Layer Corrugated Aluminum Nitride Membranes as Piezoelectric Micromachined Ultrasonic Transducers with Differential Readout and Actuation
Document type:: Konferenzbeitrag
Author(s):: Bosetti, G.; Bretthauer, C.; Steinberger, M.; Gierl, K.; Krenzer, M.; Schrag, G.
Keywords:: Bosetti; Schrag; Bretthauer; Steinberger; Gierl; Krenzer; Aluminium; Nitride; Membranes; MEMS; piezoelectric; Transducers; Differential; Readout
Book / Congress title:: 2023 IEEE International Ultrasonics Symposium (IUS)
Publisher:: IEEE
Date of publication:: 03.09.2023
Year:: 2023
Fulltext / DOI:: doi:10.1109/ius51837.2023.10307891
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