Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms

Title:: Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms
Document type:: Konferenzbeitrag
Author(s):: Bosetti, G.; Bretthauer, C.; Bogner, A.; Krenzer, M.; Gierl, K.; Heiss, H.; Schrag, G.
Book / Congress title:: 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Publisher:: IEEE
Date of publication:: 07.04.2024
Year:: 2024
Fulltext / DOI:: doi:10.1109/eurosime60745.2024.10491462
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