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Title:

Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Manz J.; Dehe A.; Schrag G.
Book / Congress title:
Proceedings of SPIE Microtechnologies 2017
Congress (additional information):
Barcelona, Spain
Date of congress:
8-10 May 2017
Year:
2017
Year / month:
2917-05
Month:
Mar
Language:
en
TUM Institution:
Lehrstuhl für Technische Elektrophysik
Ingested:
23.10.2018
 BibTeX