Benutzer: Gast  Login
Titel:

High-Throughput Apparatus for Semiconductor Device Characterization in a Magnetic Field at Extreme High Temperatures

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Okeil, H.; Schrag, G.; Wachutka, G.
Abstract:
We report on the development of a 600 °C withstanding low-noise apparatus, which enables high-throughput magnetic-field-dependent characterization of semiconductor devices bonded to a ceramic substrate at very high temperatures. A novel and simple method for electrically contacting metal pads on the ceramic substrate is developed, which allows contacting many metal pads simultaneously in limited space. The apparatus can be used for a variety of high-temperature experiments such as studying galva...     »
Stichworte:
Semiconductor, Magnetic Field, High Temperatures, High-throughput, Okeil, Schrag, Wachutka
Dewey Dezimalklassifikation:
620 Ingenieurwissenschaften
Zeitschriftentitel:
IEEE Transactions on Instrumentation and Measurement
Jahr:
2023
Band / Volume:
72
Seitenangaben Beitrag:
1-8
Volltext / DOI:
doi:10.1109/tim.2023.3315424
WWW:
https://ieeexplore.ieee.org/abstract/document/10251538
Verlag / Institution:
Institute of Electrical and Electronics Engineers (IEEE)
E-ISSN:
0018-94561557-9662
Publikationsdatum:
01.01.2023
 BibTeX