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- Title:
Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological Operating Curve
- Document type:
- Konferenzbeitrag
- Author(s):
- Hopf, Anna; Ismail, Abdelgafar; Ehm, Hans; Schneider, Daniel; Reinhart, Gunther
- Book / Congress title:
- 2022 Winter Simulation Conference (WSC)
- Publisher:
- IEEE
- Date of publication:
- 11.12.2022
- Year:
- 2022
- Fulltext / DOI:
- doi:10.1109/wsc57314.2022.10015333
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