"Macromodel-based simulation and measurement of thed ynamic pull-in of vicously damped RF-MEMS switches"

Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G.

Titel:: "Macromodel-based simulation and measurement of thed ynamic pull-in of vicously damped RF-MEMS switches"
Dokumenttyp:: Zeitschriftenaufsatz
Autor(en):: Niessner, M. ; Schrag, G.; Iannacci, J.; Wachutka, G.
Zeitschriftentitel:: Sensors and Actuators A
Jahr:: 2011
Heft / Issue:: A 172
Seitenangaben Beitrag:: 269-279
Sprache:: en
Format:: Text
BibTeX