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Document type:
Magazinartikel 
Author(s):
T. Kuenzig, A. Dehe, U. Krumbein, G. Schrag 
Title:
Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling 
Journal title:
Journal of Micromechanics and Microengineering 
Year:
2018 
Journal volume:
28 
Year / month:
2018-03 
Month:
Mar 
Language:
en 
TUM Institution:
Lehrstuhl für Technische Elektrophysik 
Ingested:
03.12.2018