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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Bosetti, G.; Manz, J.; Schrag, G.; Dehe, A. 
Title:
Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes 
Book / Congress title:
Proceedings of DTIP 2017, the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 
Congress (additional information):
Bordeaux, France 
Date of congress:
29. May – 1. June 
Year:
2017 
Year / month:
2017-05 
Month:
May 
Language:
en 
Ingested:
01.10.2018