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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Schrag, G.; Kuenzig, T. 
Title:
Towards High Fidelity Silicon Microphones: Evaluating the Potential of Industrial Microsystems Applying Tailored System-level Models 
Pages contribution:
Book / Congress title:
Proceedings of 18th International Concerence on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems 
Congress (additional information):
Eurosime 2017 
Date of congress:
April, 2 - 5, 2017 
Year:
2017 
Year / month:
2017-04 
Month:
Apr 
Pages:
Print-ISBN:
978-1-5090-4343-9 
Reviewed:
ja 
Language:
en 
Notes:
IEEE Catalog Number: CFP17566-USB