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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G. 
Title:
Modeling Distributed Electrostatic Effects in Silicon Microphones and Their Impact on the Performance 
Book / Congress title:
Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems 
Congress (additional information):
SPIE 
Year:
2015 
Pages:
9517L1-9517L6