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Document type:
Konferenzbeitrag 
Author(s):
Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G. 
Title:
Performance and Noise Analysis of Capacitive Silicon Microphones Using Tailored System-Level Simulation 
Pages contribution:
2192-2195 
Book / Congress title:
Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems 
Date of congress:
June 21-25 
Year:
2015