User: Guest  Login
Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Bechtold, T.; Schrag, G.; Feng, L. 
Title:
Enabling Technologies for System-Level Simulation of MEMS 
Book / Congress title:
Proceedings of 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 
Congress (additional information):
Wrozlaw, Poland, April 15-17, 2013 
Publisher:
IEEE 
Year:
2013 
Print-ISBN:
978-1-4673-6137-8 
Language:
en