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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Oberndörfer, J.; Schrag, G.; Wachutka, G. 
Title:
Efficient model for predictive MEMS microphone design: Model derivation and experimental verification 
Book / Congress title:
Proceedings of the EUROSENSORS XXVI 
Congress (additional information):
EUROSENSORS 2012, September 9-12, Krakow, Poland 
Publisher:
Elsevier 
Publisher address:
Amsterdam 
Year:
2012 
Reviewed:
ja 
Language:
en