Künzig, T.; Iannacci, J.; Schrag, G.; Wachutka, G.
Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch
Proceedings of the 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
EuroSime 2012, April, 16-18, Cascais, Portugal
IEEE
2012