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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G. 
Title:
Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation 
Pages contribution:
pp. 598-601 
Book / Congress title:
Proceedings of the Nanotech - NSTI 2012- Vol. 2 
Congress (additional information):
June 18-21, Santa Clara, CA, USA 
Publisher address:
New York 
Year:
2012 
Reviewed:
ja 
Language:
en