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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Niessner, M. ; Schrag, G.; Iannacci, J.; Wachutka, G. 
Title:
COMSOL API based Toolbox for the Mixed-Level Modeling of Squeeze-Film Damping in MEMS: Simulation and Experimental Validation 
Book / Congress title:
Proceedings of the 5th Europeans COMSOL Conference 
Congress (additional information):
COMSOL CONFERENCE 2011, October 26-28, Stuttgart, Germany 
Year:
2011 
Reviewed:
ja 
Language:
de 
Publication format:
CD-ROM / DVD 
Format:
Text