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- Document type:
- Konferenzbeitrag
- Author(s):
- Schrag, G. ; Niessner, M. ; Wachutka, G.
- Title:
- Reliable system-level models for electrostatically actuated devices under varying ambient conditions: Modeling and validation
- Pages contribution:
- pp. 8-13
- Book / Congress title:
- Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
- Congress (additional information):
- DTIP 2011, May 11-13, Aix-en-Provence, France
- Publisher:
- EDA Publishing/DTIP 2011
- Publisher address:
- Grenoble, France
- Year:
- 2011
- Reviewed:
- ja
- Language:
- en
- Semester:
- SS 02
- Format:
- Text
BibTeX