- Document type:
- Konferenzbeitrag
- Author(s):
- Leistner, H.; Anheuer, D.; Bosetti, G.; Schrag, G.; Richter, M.
- Title:
- "Modeling and Manufacturing of an Electrostatic Actuator for Micropumps"
- Book / Congress title:
- MikroSystemTechnik Kongress
- Year:
- 2021
BibTeX