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- Title:
Quantifying the mechanical reliability of MEMS using experimental and numerical methods
- Document type:
- Konferenzbeitrag
- Author(s):
- Ampunant, W.; Ganzhorn, K.; Laumer, B.; Schrag, G.
- Book / Congress title:
- Mikrosystemtechnik Kongress
- Date of congress:
- 28- 30 Oktober
- Year:
- 2019
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