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- Title:
Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling
- Document type:
- Magazinartikel
- Author(s):
- Kuenzig, T.; Dehe, A.; Krumbein, U.; Schrag, G.
- Journal title:
- Journal of Micromechanics and Microengineering
- Year:
- 2018
- Journal volume:
- 28
- Year / month:
- 2018-03
- Month:
- Mar
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elektrophysik
- Ingested:
- 03.12.2018
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