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- Title:
Enabling Technologies for System-Level Simulation of MEMS
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Bechtold, T.; Schrag, G.; Feng, L.
- Book / Congress title:
- Proceedings of 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
- Congress (additional information):
- Wrozlaw, Poland, April 15-17, 2013
- Publisher:
- IEEE
- Year:
- 2013
- Print-ISBN:
- 978-1-4673-6137-8
- Language:
- en
BibTeX
Occurrences:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)