System-Level Modeling of MEMS

Bechtold, T.; Schrag, G.; Feng, L.

Title:: System-Level Modeling of MEMS
Document type:: Buch
Editor:: Bechtold, T.; Schrag, G.; Feng, L.
Bookseries title:: Advanced Micro & Nanosystems
Bookseries volume:: 10
Publisher:: Wiley-VHC
Publisher address:: Weinheim
Year:: 2013
Print-ISBN:: 978-3-527-31903-9
Format:: Text
BibTeX