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- Titel:
Reliable system-level models for electrostatically actuated devices under varying ambient conditions: Modeling and validation
- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Schrag, G. ; Niessner, M. ; Wachutka, G.
- Seitenangaben Beitrag:
- pp. 8-13
- Kongress- / Buchtitel:
- Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
- Kongress / Zusatzinformationen:
- DTIP 2011, May 11-13, Aix-en-Provence, France
- Verlag / Institution:
- EDA Publishing/DTIP 2011
- Verlagsort:
- Grenoble, France
- Jahr:
- 2011
- Reviewed:
- ja
- Sprache:
- en
- Semester:
- SS 02
- Format:
- Text
BibTeX