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Title:: REACTIVITY OF SOLID SILICON WITH HYDROGEN UNDER CONDITIONS OF A LOW-PRESSURE PLASMA
Author(s):: WEBB, AP; VEPREK, S
Journal title:: CHEMICAL PHYSICS LETTERS
Year:: 1979
Journal volume:: 62
Journal issue:: 1
Pages contribution:: 173-177
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mediaTUM Gesamtbestand Einrichtungen Schools TUM School of Natural Sciences Ehemalige Einrichtungen Institut für Chemie Anorganischer Materialien (Prof. Veprek)1979