VEPREK, S;VEPREKHEIJMAN, MGJ
OPEN QUESTIONS REGARDING THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF SILICON
PLASMA CHEMISTRY AND PLASMA PROCESSING
1991
11
3
323-334

VEPREK, S;SAROTT, FA;RUCKSCHLOSS, M
TEMPERATURE-DEPENDENCE OF THE CRYSTALLITE SIZE AND CRYSTALLINE FRACTION OF MICROCRYSTALLINE SILICON DEPOSITED FROM SILANE BY PLASMA CVD
JOURNAL OF NON-CRYSTALLINE SOLIDS
1991
137
733-736

VEPREK, S;GLATZ, F;KONWITSCHNY, R
CHALLENGES AND CONFUSIONS IN THE KINETICS AND MECHANISM OF PLASMA INDUCED DEPOSITION OF A-GE-H AND MU-C-GE-H
JOURNAL OF NON-CRYSTALLINE SOLIDS
1991
137
779-782